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Ham-Let Ultra Clean Valves HM Series
Ham-Let presents the HM Series Metal Diaphragm Ultra Clean Valve, size 1/4". The HM series valves are suitable for low and high-pressure applications in multi-port configurations (2 port, L-port, 3 port, 4 port). The valve can be operated manually or automatically. Ham-Let UCV valves are assembled, inspected, tested and packaged in a Class 10 Ultra Clean room. Each valve is individually assembled and submitted to pressure testing, functionality tests and a helium leak test.
Material
Ham-Let UCV HM series valves meet the chemical composition and the mechanical properties of stainless steel 316L according to ASTM A276 specification. The material is manufactured by VIM/VAR process. Chemical Composition: The body material of the UCV HM series valves complies with SEMI F20 - Sulfur content is lower or equal to 0.01 percent.
Mechanical Size
Dimensional Specification Ham-Let UCV HM series meet the end-to-end length and overall envelope and comply with SEMATECH Technology Transfer 96063137-ENG.
Packaging
Ham-Let’s standard for packing the UCV HM series valves is in a double bag: the inner bag contains ultra pure nitrogen. All end fittings, threads and sealing surface are protected with a cap to prevent any damage.
Surface Roughness
All wetted parts have an average surface roughness (Ra avg) of 5 microinch Ra, and maximum surface roughness (Ra max) of 10 microinch Ra, complying with ISO 4288. |
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Electropolished Surfaces - Surface Finish
Ham-Let UCV HM valves meet surface defects of maximum 25 for any one location, with maximum average of 15. This test is done in accordance with SEMASPEC 90120401-STD. Ham-Let UCV HM valves meet the Chromium Enhancement ratio as the chromium to iron ratio ‡2:1, the chromium oxide to iron oxide ration ‡3:1, This test is done in accordance with SEMASPEC 90120403-STD. Ham-Let UCV HM valves meet the oxide layer depth and surface contamination as the depth of the oxide layer ‡20 angstroms after subtraction of the carbon layer. The carbon layer is 10 angstroms.
The maximum surface contamination is according to:
| Element |
Atomic percentage |
| Carbon |
30.0 |
| Sulfur |
1.0 |
| Phosphorus |
2.0 |
| Silicon |
1.5 |
| Nitrogen |
2.0 |
This test is done in accordance with SEMASPEC 91060573-STD.
HeliumTesting
All valves are 100% helium leak tested. Helium leak tests are performed using a helium leak detector machine with a sensitivity of 1*10^-10 atm cc He/sec. The standard leak rate tests are listed below. Lower leak rates are optional on request: Maximum Helium (He) leak ratings: Inboard leak integrity † 3*10^-10 atm cc/sec. Complies with SEMI F1. Outboard leak integrity † 3*10^-10 atm cc/sec. Complies with SEMI F1. Leak across the seat † 3*10^-10 atm cc/sec. This test is done in accordance with SEMASPEC 90120391B-STD (held for at least 15 seconds).
Particles
The valves standard particles contribute †20 particles/ft^3 for particles ‡0.1 m and †75 particles ‡0.02 m for static and dynamic tests, according to SEMASPEC 90120390-STD.
Moisture Testing
The valves standard moisture level is †20 ppbv H20 in Nitrogen baseline or less, within 4 hours after 2 ppmv spike for 1 minute at flow rate of 1.5 SLM or less, according to SEMASPEC 90120397-STD. |